| 摘要 |
A piezoelectric MEMS device, comprises a cantilever beam arrangement (16) with a piezoelectric actuation layer (24) for actuating movement of the cantilever beam arrangement between an open position and a closed position in which the cantilever beam arrangement causes contact with a first electrical contact (15). The cantilever beam arrangement (16) comprises at least three adjacent cantilever beams (40,42,44,46,48), wherein the beams each have a fixed connection end and are coupled together at their free contact ends to define a single shared contact region (54). The device thus comprises at least three cantilevers actuated next to each other in such a way that all contribute to the contact force. The contact force is thus increased nearly linearly with the number of cantilevers.
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