| 摘要 |
PURPOSE: A silicon crystallizing system and silicon crystallizing method using laser are provided to reduce energy irregularity along with a long axis direction of a laser beam, thereby increasing the display quality of a display device. CONSTITUTION: An optical system(13) comprises a plurality of mirrors. The optical system scans an oscillated laser beam onto a substrate(14) by changing the energy distribution and direction of a laser beam. A vibration frequency controller(54) controls a vibration frequency to vibrate at least one mirror of the optical system. The vibration frequency controller includes a vibration frequency generator(54a) and a lookup table(54b) storing a vibration frequency. A data storage system(53) stores a vibration frequency generate by the vibration frequency generator.
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