| 摘要 |
<p>In a vacuum pump, the temperature of a rotor portion is detected more accurately in accordance with a simple method. A thermistor 51 is disposed on a stator in a state where a sensor unit fixed to a frame 53 by a thin film such as a polyimide film opposes a rotor section that is a target of temperature detection. Further, assuming the non-negligible influence, in terms of measurement, that is exerted by heat from the frame, stator and so forth on the first temperature sensor (heat flow from/to the frame), the rotor temperature is estimated more accurately by detecting that influence via other sensors, to compensate for the drop or rise in temperature in the first temperature sensor, and estimate thereby more accurately the temperature of the rotor. Specifically, a second temperature sensor, or a second temperature sensor and a third temperature sensor, are disposed for the first temperature sensor, and the temperature of the rotor section is estimated on the basis of a first detection value by the first temperature sensor, and a second detection value (and a third detection value) by the second temperature sensor (and the third temperature sensor).</p> |
