发明名称 |
Apparatus for producing multilayer sheet and method of producing the multilayer sheet |
摘要 |
An apparatus for producing a multilayer sheet including a resin film, a vapor-deposited metal film and a vapor-deposited polymer film at a low cost and with excellent productivity is provided which comprises: a vacuum chamber 22 which is made to be in a vacuum state by exhaust means 24, 26; a feeding roller 28; a take up roller 30; a first to third rollers 32, 34, and 36; first metal vapor deposition means 38a, 40a for forming a first vapor-deposited metal film on one surface of a resin film at a periphery of the first roller 32; vapor deposition polymerization means 52, 54 for forming a vapor-deposited polymer film on the first vapor-deposited metal film by vapor deposition polymerization at a periphery of the second roller 34; and second metal vapor deposition means 38b, 40b for forming the second vapor-deposited metal film on the other surface of the resin film at a periphery of the third roller 36.
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申请公布号 |
EP2316985(A2) |
申请公布日期 |
2011.05.04 |
申请号 |
EP20100251790 |
申请日期 |
2010.10.13 |
申请人 |
KOJIMA PRESS INDUSTRY CO., LTD.;ULVAC, INC. |
发明人 |
ITO, KAORU;NOGUCHI, MASUMI;TANAKA, HIDEAKI;IKEDA, HIROYUKI;SHIMOMURA, MAKOTO;TADA, ISAO;HAYASHI, NOBUHIRO;IRIKURA, HAGANE |
分类号 |
C23C14/56;B05D7/24;C23C14/06;C23C14/20;H01G4/015;H01G4/18;H01G13/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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