| 摘要 |
<p>PURPOSE: A transferring system for magnetic levitation is provided to use a magnetic levitation method when an object is transferred, thereby minimizing particles generated due to the transferring. CONSTITUTION: An object is loaded in a loading unit(110). The loading unit is coupled with a common support frame(120). A track rail forms a route through which the common support frame is transferred. A levitation unit(130) levitates the common support frame. A power supply unit supplies power to the levitation unit and a propulsion unit.</p> |
