Electrostatic beam deflection scanner and beam deflection scanning method,申请号EP20070109255-传众专利搜索

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发明名称	Electrostatic beam deflection scanner and beam deflection scanning method
摘要
申请公布号	EP1863065(B1)	申请公布日期	2011.05.04
申请号	EP20070109255	申请日期	2007.05.30
申请人	SEN CORPORATION, AN SHI AND AXCELIS COMPANY	发明人	TSUKIHARA, MITSUKUNI;KABASAWA, MITSUAKI;AMANO, YOSHITAKA;MATSUHITA, HIROSHI
分类号	H01J37/317;H01J37/147;H01J37/153	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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