<p>A substrate transport system adapted for transporting a substrate moving in a substrate transport direction in a processing chamber is provided. The substrate transport system includes a plurality of transport rollers each having a transport shaft and a transport wheel. The transport shaft and the transport wheel are adapted for supporting the moving substrate. A heating means is arranged between the position of the moving substrate and the transport shaft and is adapted for heating the moving substrate.</p>
申请公布号
EP2317545(A1)
申请公布日期
2011.05.04
申请号
EP20090174693
申请日期
2009.10.30
申请人
APPLIED MATERIALS, INC.
发明人
SCHAEFER, MICHAEL;BERGMANN, TOBIAS;HOFFMANN, JOSEF;SAUER, ANDREAS;HENRICH, JUERGEN;GEISS, ANDREAS