| 摘要 |
<p>A constant flow rate control device is comparatively inexpensive, simple, compact in size, easily processed and excellent in assembling, suppresses occurrence of clogging or the like even if the device controls a minute flow rate, providing a maintenance-free condition, and can highly accurately perform predetermined flow rate control by suppressing a temperature-originated variation in a controlled flow rate, making it possible to simultaneously achieve high productivity, high reliability, and highly accurate constant flow rate control. The constant flow rate control device of the invention has a plurality of restriction holes (231-235) formed in a single opening member (230) of a restricting element (200), so that fluid is caused to pass through, in sequence, the restriction holes through flow passages formed by pressure chamber forming flow passages (221A, 222A, 223A, 241A, 242A, 243A). As a result, when the fluid is controlled to the same flow rate as the one controlled by conventional constant flow rate valves, the effective area of the restriction holes is greater than that of the conventional constant flow rate valves.</p> |
