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发明名称
CAPACITOR FOR A SEMICONDUCTOR ARRANGEMENT AND METHOD FOR PRODUCING A DIELECTRIC LAYER FOR THE CAPACITOR
摘要
申请公布号
EP1186030(B1)
申请公布日期
2011.05.04
申请号
EP20000943545
申请日期
2000.05.04
申请人
QIMONDA AG
发明人
HANEDER, THOMAS, PETER;REISINGER, HANS;STENGL, REINHARD;BACHHOFER, HARALD;HOENLEIN, WOLFGANG
分类号
H01L21/316;H01L21/8242;H01L27/108;H01L21/02
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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