Detection device and particle beam device having a detection device

摘要

The invention relates to a detection device (22) and a particle beam device (1) having a detection device (22). The detection device (22) and the particle beam device (1) ensure a good efficiency in detecting interaction particles and electro-magnetic radiation. The detection device (22) has a detector (14) for detecting electromagnetic radiation and/or interaction particles and a filter element (13) through which the electromagnetic radiation is transmitted and which is designed for preventing the interaction particles from striking the detector (14) wherein the filter element (13) is situated to move between a first position (A) and a second position (B), the filter element (13) in the first position (A) being situated in relation to the detector (14) in such a way that the filter element (13) prevents the interaction particles from striking the detector (14), and wherein the filter element (13) in the second position (B) is situated in relation to the detector (14) in such a way that the filter element (13) allows the interaction particles to strike the detector (14). As an alternative, the filter element (13) may be designed as an object holder.