HIGH RELIABLE RF GENERATOR STRUCTURE CAPABLE OF FACILITATING THE REMOVAL AND REPLACEMENT OF A BROKEN RF POWER GENERATOR

摘要

PURPOSE: A high reliable RF generator structure is provided to permanently store a high speed event which is instantaneously generated before a breakdown occurs. CONSTITUTION: Driver modules(14-1,14-2,14-3,14-4) generate RF power. A power amplifier module amplifies RF power. A voltage clamping circuit receives the amplified RF power and electrically protects the driver module. A data obtaining module includes a first communication port and receives diagnosis data related to the power amplifier module. The data obtaining module stores data received for a preset time before a breakdown is displayed through the first communication port.