发明名称 |
Reduced floating body effect without impact on performance-enhancing stress |
摘要 |
A method, gated device and design structure are presented for providing reduced floating body effect (FBE) while not impacting performance enhancing stress. One method includes forming damage in a portion of a substrate adjacent to a gate; removing a portion of the damaged portion to form a trench, leaving another portion of the damaged portion at least adjacent to a channel region; and substantially filling the trench with a material to form a source/drain region.
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申请公布号 |
US7936017(B2) |
申请公布日期 |
2011.05.03 |
申请号 |
US20080120836 |
申请日期 |
2008.05.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CLARK, JR. WILLIAM F.;FURUKAWA TOSHIHARU;HUA XUEFENG;KOBURGER, III CHARLES W.;ROBISON ROBERT R. |
分类号 |
H01L27/01;H01L27/12;H01L31/0392 |
主分类号 |
H01L27/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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