发明名称 |
Silicon production with a fluidized bed reactor integrated into a siemens-type process |
摘要 |
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
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申请公布号 |
US7935327(B2) |
申请公布日期 |
2011.05.03 |
申请号 |
US20060512853 |
申请日期 |
2006.08.30 |
申请人 |
HEMLOCK SEMICONDUCTOR CORPORATION |
发明人 |
ARVIDSON ARVID NEIL;MOLNAR MICHAEL |
分类号 |
C01B33/027 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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