发明名称 |
Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics |
摘要 |
A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field.
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申请公布号 |
US7935924(B2) |
申请公布日期 |
2011.05.03 |
申请号 |
US20080168439 |
申请日期 |
2008.07.07 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
CHEUNG KERRY;VELASQUEZ-GARCIA LUIS F.;AKINWANDE AKINTUNDE I. |
分类号 |
H01J37/12 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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