HIGHLY DENSE MAGNETOELECTRIC NANOCOMPOSITE THICK FILM AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A highly dense magnetoelectric nano composite thick film and manufacturing method thereof are provided to form a ceramic film on a part of a substrate by a vacuum room temperature powder spray method, thereby realizing ferroelectric properties and magnetic properties. CONSTITUTION: A ceramic material is used in a mixing container(S100). A ceramic material and a carrier gas are mixed by supplying a carrier gas to the mixing container(S200). The mixture of the ceramic material and the carrier gas is sprayed on a substrate(S300). A nano composite thick film is formed on the substrate(S400). The formed nano composite thick film as described above is heat-treated and the particle size is grown up (S500).