发明名称 METHOD FOR FORMING SELECTIVE EMITTER OF SOLAR CELL AND THE APPARATUS THEREOF
摘要 PURPOSE: A method for forming a selective emitter of a solar battery and device thereof are provided to perform a screen printing process, an oxide solution coating process, and a heat treating process just one time to form a selective emitter on the frontal surface of a semiconductor substrate, thereby saving the manufacturing costs of the solar battery. CONSTITUTION: A highly doped impurity paste is printed using a screen mask on the frontal surface of a semiconductor substrate(S100). The semiconductor substrate passes a fog layer with impurities so that the impurities are attached to the frontal surface of the semiconductor substrates(S110). The semiconductor substrate with the impurities are processed by heat(S120). A heavily doped impurity area is formed in the area on which the highly doped impurity paste is printed. A lightly doped impurity area is formed on the area to which the impurities are attached.
申请公布号 KR20110044619(A) 申请公布日期 2011.04.29
申请号 KR20090101391 申请日期 2009.10.23
申请人 HYOSUNG CORPORATION 发明人 LIM, CHUNG HYUN;CHO, YOUNG HYUN
分类号 H01L31/04 主分类号 H01L31/04
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