SELECTIVELY PATTERNED NANO-POROUS STRUCTURE ON SILICON SUBSTRATE FOR SOLAR CELL AND PREPARATION METHOD THEREOF
摘要
PURPOSE: A silicon substrate for a solar battery on which a selective pattern with a nano-porous structure is formed and manufacturing method thereof are provided to form a nano-porous structure on the silicon substrate to reduce reflectivity, thereby increasing the lifetime of a carrier. CONSTITUTION: A desired pattern is formed on a silicon substrate by a photolithographic method. Nitric acid and hydrofluoric acid are mixed so that an acid mixture solution is manufactured. The acid mixture solution is mixed with water whose amount is 1~5 times larger than the acid mixture solution so that a diluted acid mixture solution is manufactured. The silicon substrate is dipped in the diluted acid mixture solution so that a nano-porous structure is formed in the pattern.
申请公布号
KR20110044413(A)
申请公布日期
2011.04.29
申请号
KR20090101064
申请日期
2009.10.23
申请人
SUNGKYUNKWAN UNIVERSITY FOUNDATION FOR CORPORATE COLLABORATION
发明人
YI, JUN SIN;KIM, SUNG CHUL;YANG, DOO HWAN;KIM, SUN YONG