ELECTROSTATIC CHUCKING APPARATUS AND METHOD FOR MANUFACTURING THEREOF

摘要

PURPOSE: An electrostatic absorbing device and manufacturing method thereof are provided to install a rotation member between an electrode connecting unit and a connector receiving DC power from the outside, thereby preventing rotation of the connector from being influenced to the electrode connecting unit. CONSTITUTION: A base member(110) comprises a port unit(114). A first insulator(120) is formed on the base member. A chucking electrode(130) is formed in the first insulator to generate an electrostatic force. An electrode connecting unit(140) is electrically connected to the chucking electrode. A rotation member(170) is connected to the electrode connecting unit.