STORAGE CONTAINER FOR SUBSTRATES AND TRANSPORT FACILITY FOR THE CONTAINER

摘要

PURPOSE: A storage container for a substrate and transport facility for the container are provided to automatically separate a container member from a mount supporting member, thereby easily cleaning only a container body. CONSTITUTION: A container body(3) comprises a substrate receiving space(S) which receives a rectangular substrate(1). The container body includes an outlet(21) through which a substrate enters/exits and an inlet(22). The outlet and the inlet face each other. A fan filter unit(5) supplies fresh air to a substrate receiving space of the container body. The container body is mounted on a mount supporting member(4).