发明名称 Method of passivation of pn junction devices
摘要 1,111,991. Semi-conductor devices. NATIONAL RESEARCH DEVELOPMENT CORPORATION. 24 Feb., 1966 [25 Feb., 1965], No. 8236/65. Heading H1K, A PN junction in an A m B v compound semiconductor body is protected by an epitaxial layer of semi-insulating material produced by diffusion into the body or vapour deposition on it. In a typical case the material is deposited on a transistor zone structure formed by oxide masking technique after removal of the oxide, contacts being made to the zones by alloying through the material. Alternatively a layer of intrinsic gallium arsenide is epitaxially deposited on a doped body of the same material and a buried PN junction formed by alloying through the intrinsic layer. The use of gallium phosphide to protect PN junctions in gallium phosphide is also suggested.
申请公布号 GB1111991(A) 申请公布日期 1968.05.01
申请号 GB19650008236 申请日期 1965.02.25
申请人 NATIONAL RESEARCH DEVELOPMENT CORPORATION 发明人 COUPLAND MICHAEL JOHN;BROOM RONALD FRANCIS JOHNSTON
分类号 H01L21/00;H01L23/29 主分类号 H01L21/00
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