发明名称 |
Micro-Fluid Ejection Devices, Methods for Making Micro-Fluid Ejection Heads, And Micro-Fluid Ejection Head Having High Resistance Thin Film Heaters |
摘要 |
Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection heads, including a micro-fluid ejection head. One such micro-fluid ejection head has relatively high resistance thin film heaters adjacent to a substrate. The thin film material comprises silicon, metal, and carbon (SiMC wherein M is a metal). Each thin film heater has a sheet resistance ranging from about 100 to about 600 ohms per square and a thickness ranging from about 100 to about 800 Angstroms.
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申请公布号 |
US2011094102(A1) |
申请公布日期 |
2011.04.28 |
申请号 |
US20100690955 |
申请日期 |
2010.02.16 |
申请人 |
LEXMARK INTERNATIONAL, INC. |
发明人 |
GUAN YIMIN;JACOBSEN STUART;SULLIVAN CARL |
分类号 |
B23P17/00 |
主分类号 |
B23P17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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