| 摘要 |
<P>PROBLEM TO BE SOLVED: To deposit a reflection-preventive film without any irregularity in the film thickness of a concave lens. <P>SOLUTION: The reflection-preventive film is deposited on a concave lens 1 by the sputtering method via a mask 2 for adjusting the film thickness installed parallel to a target 10. The mask 2 has a circular aperture 2a having an aperture diameter A smaller than the lens diameter D of the concave lens 1. The aperture 2a of the mask 2 is arranged on the inner side of the tangent plane at an edge of the concave lens 1. By executing the film deposition while rotating the concave lens 1, the film thickness to the concave lens 1 having a small radius R of curvature is unified. <P>COPYRIGHT: (C)2011,JPO&INPIT |
