| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which enables an effective coating region where the coat thickness of a coating liquid on a substrate is almost uniform, to be comparatively larger in size, as well as a coating method. SOLUTION: The coating device 10 for applying the coating liquid to the substrate S includes sliding mechanisms 32 and 34 which slide a coating part 30 to a coating part support mechanism 20, in the moving direction of the support mechanism 20. In addition, a control part 50 moves the coating part support mechanism 20 until the relative velocity of the coating part 30 to a pedestal 12 can reach a specified higher proportion, when starting the transfer of the coating part support mechanism 20. Further, the control part 50 operates to control so as to slide the coating part 30 to the coating part support mechanism 20 in the transfer direction of the coating part support mechanism 20 with the help of the sliding mechanisms 32 and 34. COPYRIGHT: (C)2011,JPO&INPIT
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