| 摘要 |
PROBLEM TO BE SOLVED: To provide a Mirau type interference objective lens that obtains a desired interference fringe without using an inclination stage. SOLUTION: The interference objective lens includes: an objective lens system for condensing light onto the specimen surface for illuminating the specimen surface; an optical path splitting means disposed between the specimen surface and the objective lens system and configured to split the light emitted from the objective lens system into rays of light, reflect one ray of light in a direction different from the specimen surface and transmit the other ray of light in the direction of the specimen surface; a reference mirror for reflecting the light reflected by the optical path splitting means so that the light reflected by the optical path splitting means and light passed through the optical path splitting means and reflected by the specimen surface may be combined by the optical path splitting means; and a lens barrel holding the reference mirror so as to alter the angle of the reference mirror relative to a plane intersecting the optical axis of the objective lens system at right angles. COPYRIGHT: (C)2011,JPO&INPIT
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