METHOD OF MANUFACTURING CELL ELECTROPHYSIOLOGICAL SENSOR AND SHAPE INSPECTION DEVICE USED FOR THE METHOD

摘要

PROBLEM TO BE SOLVED: To improve productivity of a cell electrophysiological sensor. SOLUTION: The method of manufacturing the cell electrophysiological sensor includes steps of: irradiating a sensor chip 16 having a through-hole 15 mounted on a mounting substrate 17 or the sensor chip 16 having the through-hole 15 before mounted on the mounting substrate 17 with light from a light source 11 to acquire optical information transmitted through the through-hole 15 of the sensor chip 16 by an optical information acquisition means 12; individually making the optical information acquired during the prior step into a brightness value in a minimum unit by an optical information processing means 13; and determining whether a shape of the through-hole 15 is good in the atmosphere by a structure pattern including the minimum unit of a standard value or larger of the brightness value obtained during the prior step. Thus, the shape of the through-hole 15 of the cell electrophysiological sensor 14 can be simply and quickly inspected. COPYRIGHT: (C)2011,JPO&INPIT