| 摘要 |
PROBLEM TO BE SOLVED: To provide an highly-reliable X-ray inspection device which properly inspects the length in a predetermined direction, bering a characteristic value, of an object to be inspected, regardless of the direction or inclination of the object to be inspected. SOLUTION: The extraction part 23 of the X-ray inspection device has a reference direction calculation part 231 for calculating the reference direction of the image region (inspection region) of the inspection target contained in the X-ray image sent from an image processing part 22, an inspection direction forming part 232 for forming one or a plurality of directions, which is rotated by predetermined angle from the reference direction calculated in the reference direction calculation part 231, as an inspection direction and a length calculation part 233 for extracting the length of the inspection region in the inspection direction formed in the inspection direction forming part 232 as feature quantity. Since the direction for performing inspection is determined on the basis of the reference direction in the extraction part 23, the length in each direction of the inspection target can be properly calculated regardless of the inclination of the inspection target. As a result, X-ray inspection of high reliability can be performed. COPYRIGHT: (C)2011,JPO&INPIT
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