| 摘要 |
The present invention relates to a measurement apparatus capable of improving measurement precision of a measurement object using measurement light without deteriorating the visibility of the measurement object. An observation illumination device 12 has: three types of light sources, i.e., a LED 51 which emits red single-color light, a LED 52 which emits green single-color light, and a LED 53 which emits blue single-color light. The three types of the light of red, green, and blue emitted from the LEDs 51 to 53 irradiates the measurement object 2 at the same time or in a short period of time, thereby becoming observation light, which is perceived by humans as illumination of white light, and irradiates the measurement object 2. The measurement light source 31 is a light source which emits measurement light used in measurement of the shape of the measurement object 2 and is composed of a light source which emits near-infrared single-color laser light having a wavelength different from that of the LED 51. Among the light that enters an optical filter 39 from the measurement object 2, the measurement light transmits therethrough, the observation light is cut off, and the light transmitted through the optical filter 39 forms an image on a light-receiving surface of an image pickup element 41. The present invention can be applied to, for example, a shape measurement apparatus.
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