MULTIBEAM DEFLECTOR, TWO DIMENSIONAL SCANNER, AND MULTIBEAM DEFLECTOR MODULE

摘要

PROBLEM TO BE SOLVED: To provide a multibeam deflector for deflecting a plurality of beams in a plurality of directions and having sufficient deflection angles for practical applications. SOLUTION: The multibeam deflector includes: a plurality of optical deflection devices deflecting light beams to one direction on a common substrate 101; and output optical systems 104 and 105. Each of the optical deflection devices includes slab optical waveguides 102 and 103 formed by a material having an electro-optic effect. The output optical systems 104 and 105 separate the beams emitted from the optical deflection devices from each other. Thus, the plurality of deflection beams emitted from the common substrate can be deflected in the plurality of directions through the output optical systems 104 and 105 for separating the beams from each other. COPYRIGHT: (C)2011,JPO&INPIT