APPARATUS FOR FORMING A THIN LAYER ON A SUBSTRATE

摘要

PURPOSE: An apparatus for forming a thin film on a substrate is provided to reduce manufacturing costs by integrating the functions of transferring and reversing the substrate. CONSTITUTION: A first process module includes a process chamber for forming a thin film on a first surface. A second process module(130) includes the process chamber on a second surface of the substrate. A reverse module connects the first process module to the second process module and reverses and transfers the substrate between the first and second process modules. The reverse module includes a reverse arm(160) and a rotation driver(156). The reverse arm includes a space for receiving the substrate, and reverses and transfers the substrate.