发明名称 |
FLUID CONVEYANCE SYSTEM INCLUDING FLEXIBLE RETAINING MECHANISM |
摘要 |
A fluid conveyance system for thin film material deposition includes a fluid distribution manifold and a substrate transport mechanism. The fluid distribution manifold includes an output face that includes a plurality of elongated slots. The output face of the fluid distribution manifold is positioned opposite a first surface of the substrate such that the elongated slots face the first surface of the substrate and are positioned proximate to the first surface of the substrate. The substrate transport mechanism causes a substrate to travel in a direction and includes a flexible mechanism that contacts a second surface of the substrate in a region that is proximate to the output face of the fluid distribution manifold.
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申请公布号 |
US2011097494(A1) |
申请公布日期 |
2011.04.28 |
申请号 |
US20090606231 |
申请日期 |
2009.10.27 |
申请人 |
KERR ROGER S;LEVY DAVID H;SUTTON JAMES E |
发明人 |
KERR ROGER S.;LEVY DAVID H.;SUTTON JAMES E. |
分类号 |
C23C16/458;C23C16/00 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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