发明名称 Methods of Fabricating Field Effect Transistors Having Protruded Active Regions
摘要 Provided are a field effect transistor, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor may have a structure in which a double gate field effect transistor and a recess channel array transistor are formed in a single transistor in order to improve a short channel effect which occurs as field effect transistors become more highly integrated, a method of manufacturing the same, and an electronic device including the field effect transistor. The field effect transistor can exhibit stable device characteristics even when more highly integrated in such a manner that both the length and width of a channel increase and particularly the channel can be significantly long, and can be manufactured simply.
申请公布号 US2011095345(A1) 申请公布日期 2011.04.28
申请号 US20100977811 申请日期 2010.12.23
申请人 LEE JI-YOUNG;SEO JUN 发明人 LEE JI-YOUNG;SEO JUN
分类号 H01L29/78 主分类号 H01L29/78
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