| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface flaw inspection device for detecting recess and projection flaws on the surface of a transparent sheet-shaped article without missing flaw, determining the direction of the recess and projection surface of the sheet-shaped article by a simple signal in real time, and performing quality control with high reliability. SOLUTION: The surface flaw inspection device includes an illumination means for emitting a parallel light onto a running transparent sheet-shaped article from an oblique direction; and a photographic means and processing means for continuously detecting the light reflected from the surface of the sheet-shaped article. The device also for sheet-shaped articles is able to solve problems, by determining the presence or absence of a recess and projection flaw on the surface of the sheet-shaped article, and whether the detected surface is a recess flaw or a projection flaw. COPYRIGHT: (C)2011,JPO&INPIT
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