发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The invention provides a method of manufacturing a semiconductor device having a MOS transistor, a resistor element, etc on one semiconductor substrate, in which the number of masks and the number of manufacturing steps are decreased. In an NMOS formation region, a channel stopper layer is formed in a P type well by a first ion implantation process. Then a punch-through prevention layer is formed in the P type well by a second ion implantation process. On the other hand, in a first high resistor element formation region and a second high resistor element formation region, utilizing the first and second ion implantation processes, a resistor layer is formed in an N type well.
申请公布号 US2011097860(A1) 申请公布日期 2011.04.28
申请号 US20100875326 申请日期 2010.09.03
申请人 SANYO ELECTRIC CO., LTD.;SANYO SEMICONDUCTOR CO., LTD. 发明人 IIDA IZUO
分类号 H01L21/8249;H01L21/8234 主分类号 H01L21/8249
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