OPTICAL WAVEGUIDE SUBSTRATE HAVING POSITIONING STRUCTURE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING OPTO-ELECTRIC HYBRID SUBSTRATE

摘要

Disclosed are positioning structures provided in an optical waveguide and an optical connection portion, which enable a reduction in the number of parts and process simplification and can be fabricated with high positional accuracy and high yield in an optical waveguide substrate and an opto-electric hybrid substrate, and methods for manufacturing the substrates using same. In the optical waveguide substrate, a mirror member is pattern-formed in an arbitrarily defined position on a clad layer (11), simultaneously positioning patterns (14) each having a convex shape are formed in arbitrarily defined positions of the outer periphery of the mirror pattern (13), and the mirror pattern (13) is worked into a taper shape. Then, a metallic film is formed on the surfaces of a slope portion (22) of the mirror pattern and the positioning patterns (14) while a mask member (100) having through-holes in desired positions and the positioning patterns (14) are positioned by fitting. A wiring core pattern (20) is formed on the clad layer (11) adjacent to the mirror pattern (13) while the positioning pattern (14) and a photomask (16) are positioned.