METHOD FOR REDUCING CAPACITANCE AND IMPROVING HIGH FREQUENCY PERFORMANCE IN VERTICAL CAVITY SURFACE EMITTING LASERS (VCSELS)

摘要

A VCSEL structure is provided. The VCSEL structure comprises a substrate. The structure may also include one or more conducting layers positioned on the substrate. There may be void spaces positioned between portions of the conducting layers to electrically isolate the portions. A method for fabricating the VCSEL structure is also provided.