METHOD OF MANUFACTURING CERAMIC FILM, FERROELECTRIC ELEMENT AND ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic film which can form a ceramic film with priority orientation in a specific direction at low temperature.

SOLUTION: The method of manufacturing a ceramic film 3 includes a step wherein a precursor solution represented by PbZrxTi1-xO3(x: 0-0.6) is applied to a substrate 1 and the substrate 1 is dried at a temperature of 300°C or lower to form a precursor film, and a step wherein, after a bivalent lead ion (Pb2+) in the precursor is reduced into a zero-valent lead (Pb0) to suppress the generation of pyrochlore phase and then the substrate is baked at low temperature in an oxidizing atmosphere to generate perovskite phase.

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