| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid supply system or the like of a coating apparatus which is excellent in safety, economy, and productivity. SOLUTION: The liquid supply system 1 for supplying a chemical liquid to the coating part 120 of a coating apparatus 100 is equipped with a buffer tank 3 for storing a chemical liquid, a pipeline 5-1, a pipeline 5-2 connected to the buffer tank 3 to supply the chemical liquid to the buffer tank 3, a pipeline 5-4 connected to the buffer tank 3 to supply a gas for pressurization to the buffer tank 3, and a pipeline 5-5 connected to the buffer tank 3 and the coating part 120 such as a discharge part 13 and a coating nozzle 14 to supply the chemical liquid from the buffer tank 3 to the coating part 120. The pipelines 5-1 and 5-2 can be connected so as to keep a container 17 made of a resin detachable, so that the pipeline 5-1 can supply a gas to the connected container 17 made of a resin. COPYRIGHT: (C)2011,JPO&INPIT
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