发明名称 SPATIAL LIGHT MODULATOR, OPTICAL APPARATUS, AND EXPOSURE APPARATUS
摘要 <p>Disclosed is a spatial light modulator (25) which modulates illuminating light. The spatial light modulator is provided with: a plurality of fine divided ring resonators (20X, 20Y), each of which is disposed in each of pixels (5) on the optical path of the illuminating light, and is composed of a conductive body having a width equivalent to or smaller than the wavelength of the illuminating light; and a modulating section (19), which modulates the resonance frequency of the divided ring resonators (20X, 20Y) for each of the pixels (5). The spatial light modulator (25) can be used as a ultraviolet transmissive modulator, and has a high response speed.</p>
申请公布号 WO2011049004(A1) 申请公布日期 2011.04.28
申请号 WO2010JP68096 申请日期 2010.10.14
申请人 NIKON CORPORATION;OWA SOICHI 发明人 OWA SOICHI
分类号 G02B26/02;G02F1/01;H01L21/027 主分类号 G02B26/02
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