| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface property measuring instrument for rapidly evaluating contact measurement result and non-contact measurement result. SOLUTION: The surface property measuring instrument includes a stage, a contact-type detector 20 with a stylus, an image probe 30, a relative movement mechanism 40, a display 52, an a storage 53 for therein storing measurement data and image data, with the measurement data acquired from the detector and the image probe while the image data acquired by the image probe, and a control apparatus 50. The control apparatus makes the measured data acquired from the detector and the measurement data acquired from the image probe which are stored in the storage, output to the display 52, while being made to output to the same paper by a printer 58. COPYRIGHT: (C)2011,JPO&INPIT |
