METHOD FOR FABRICATING THIN FILM SOLAR CELL

摘要

PURPOSE: A method for manufacturing a thin film solar battery is provided to quickly oxidize and passivate a crystallized silicon film exposed after patterning, thereby obtaining a stable cell structure. CONSTITUTION: A transparent electrode(103a) is separated from a substrate(101). A first separation unit(105) is placed between the transparent electrode and the substrate. A semiconductor layer is formed on the frontal surface of the electrode including the transparent electrode. A second separation unit(109) is formed by eliminating a fixed area of the semiconductor layer. A metallic conductive layer(111) is formed on the semiconductor layer including the second separation unit. A gas or liquid is sprayed on the fixed area of the metallic conductive layer to form a metallic electrode.