发明名称 ELECTRICAL CONNECTING APPARATUS AND TESTING SYSTEM USING THE SAME
摘要 PURPOSE: An electrical connecting device and testing device using the same are provided to suction the first and second spaces between a connection unit and a probe unit, thereby solidly coupling the first and second spaces. CONSTITUTION: A chip unit(46) comprises a chip support object(58) and a plurality of electronic components(56) arranged on the chip support object. A probe unit(48) comprises a probe support object and a plurality of contacts arranged under the probe support object. A connection unit(50) is arranged between the chip unit and the probe unit. A first seal member(96) is arranged between the chip unit and the connection unit. A second seal member isolates the second space between the probe unit and the connection unit.
申请公布号 KR20110044143(A) 申请公布日期 2011.04.28
申请号 KR20100100121 申请日期 2010.10.14
申请人 KABUSHIKI KAISHA NIHON MICRONICS 发明人 WASHIO KENICHI;HASEGAWA MASASHI
分类号 H01L21/66;G01R1/06;G01R31/28 主分类号 H01L21/66
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