发明名称 |
ELECTRICAL CONNECTING APPARATUS AND TESTING SYSTEM USING THE SAME |
摘要 |
PURPOSE: An electrical connecting device and testing device using the same are provided to suction the first and second spaces between a connection unit and a probe unit, thereby solidly coupling the first and second spaces. CONSTITUTION: A chip unit(46) comprises a chip support object(58) and a plurality of electronic components(56) arranged on the chip support object. A probe unit(48) comprises a probe support object and a plurality of contacts arranged under the probe support object. A connection unit(50) is arranged between the chip unit and the probe unit. A first seal member(96) is arranged between the chip unit and the connection unit. A second seal member isolates the second space between the probe unit and the connection unit.
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申请公布号 |
KR20110044143(A) |
申请公布日期 |
2011.04.28 |
申请号 |
KR20100100121 |
申请日期 |
2010.10.14 |
申请人 |
KABUSHIKI KAISHA NIHON MICRONICS |
发明人 |
WASHIO KENICHI;HASEGAWA MASASHI |
分类号 |
H01L21/66;G01R1/06;G01R31/28 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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