发明名称 DEVICE FOR SEPARATING AND EXTRACTING CUT SHEET
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a device for separating and extracting cut sheets, capable of reducing a surface flaw, chip, crack and the like and separating overlapped cut sheets one by one easily and stably. <P>SOLUTION: A device for separating and extracting cut sheets includes: a conveyance means 3 arranged above a treatment liquid tank 2; a sheet mounting means 4 arranged below the conveyance means 3 and capable of mounting each of cut sheets 5 to be overlapped, wherein each cut sheet is obtained by continuously cutting an ingot in a sheet shape; an injection device 6 by which a jet flow is injected to the cut sheets 5 mounted on the mounting means 4 from the horizontal direction in a conical shape; and a treatment liquid-sucking means 9 arranged above the mounting means 4. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011086739(A) 申请公布日期 2011.04.28
申请号 JP20090237935 申请日期 2009.10.15
申请人 FUASHIRITEI:KK 发明人 KISHI KAZUYUKI
分类号 H01L21/304;H01L31/04 主分类号 H01L21/304
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