| 摘要 |
PROBLEM TO BE SOLVED: To provide a work levitation device detecting and correcting partial warping and deflection caused in a work. SOLUTION: A fluid jetting body for jetting fluid for levitating the work is arranged at a predetermined interval in the advancing direction of the work, and a carrying device is arranged for moving the work in a levitated state, and a sensor is respectively arranged between the fluid jetting bodies arranged at the predetermined interval, and a floating distance of the work in a vertical position provided with the respective sensors, can be measured thereby, and simultaneous measuring processing is performed for simultaneously measuring the levitation distance of the work by a plurality of these sensors, and an average value of a measuring result of all the sensors measured by this simultaneous measuring processing is calculated. When a specific sensor measures a different measuring result by exceeding a predetermined threshold value by comparing with this average value, fluid adjusting processing is performed for adjusting a flow rate or pressure of the fluid jetted by the just near fluid jetting body arranged on the side in the advancing direction of the work when viewed from the specific sensor. COPYRIGHT: (C)2011,JPO&INPIT
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