FILLER FOR SEMICONDUCTOR CAPACITOR AND METHOD FOR MANUFACTURING SEMICONDUCTOR CAPACITOR USING THE SAME

摘要

PURPOSE: A filler for a semiconductor capacitor and method for manufacturing a semiconductor capacitor using the same are provided to convert a silicon based compound with a t-butyloxycarbonyl group into a carboxyl group by a heating process, thereby increasing development performance. CONSTITUTION: A conductive layer is formed on the semiconductor substrate(1). A filling layer is formed by coating the conductive layer with filler. A part of the conductive layer is eliminated to form a first electrode(5a). A dielectric layer(9) is formed on the first electrode. A second electrode(11) is formed on the dielectric layer.