RF SIGNAL PROCESSING APPARATUS AND RF SIGNAL PROCESSING METHOD

摘要

PURPOSE: An RF(Radio Frequency) signal processing apparatus is provided to stably control RF power source using a sampling frequency. CONSTITUTION: A sensor unit(140) measures the output voltage and current of the RF power. The sensor unit generates a voltage signal and a current signal. A sampling unit(210) samples the current signal and the voltage signal through the sampling frequency. The sampling unit generates a sampling current signal and a sampling voltage signal. A signal processing unit(201) processes the sampling current signal and the sampling voltage signal through a pipeline.