| 摘要 |
PROBLEM TO BE SOLVED: To obtain the surface or inner layer inspection device of a flying spot system, capable of collecting a wide range of light by a light guide body and capable of performing the surface or inner layer inspection of an FPD related material, such as a glass film, an optical film, a metal material, such as copper foil and an industrial product such as an optical glass substrate, a photosensitive drum, or the like, with high sensitivity at low cost, while attaining high speedup and miniaturization. SOLUTION: The surface or inner layer inspection device of the flying spot system is constituted so as to scan a laser beam or a white light, by using a polygon scanner or a galvanoscanner to detect the same by a scanner light detection unit and is constituted of the light guide body wherein a plurality of light guide rods are bundled by the scanner light detection unit, and the light detection sensor attached to one end part of the light guide body and the mirror or light detection sensor attached to the other end part of the light guide body. COPYRIGHT: (C)2011,JPO&INPIT |
