| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain superior heat uniformity in an operating temperature of a wide range of a ceramic heater. <P>SOLUTION: A resistive exothermic body 30 is higher in content of molybdenum carbide in the center vicinity part 35 than in the outer peripheral part 34. Since molybdenum carbide is lower in the resistance temperature coefficient compared with that of molybdenum, even if the temperature rises, since exothermic amount does not increase in the center vicinity part 35 of the resistance exothermic body 30 as much as in the outer peripheral part 34, increase in the temperature difference between the outer peripheral part 33 and the center vicinity part 35 can be suppressed. That is, the formation of hot spots in the vicinity of the center can be suppressed, and superior heat uniformity in the operating temperature of the wide range can be obtained. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
