| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of transferring a substrate and a substrate transfer device that can transfer even a thin square substrate to a grooved boat without any damage. SOLUTION: The present invention relates to a method of transferring the substrate to the grooved boat and a substrate transfer device characterized in tilting the grooved boat into a vertical posture, horizontally moving and inserting the substrate in a vertically stood state along a boat groove of the grooved boat, and putting the grooved boat into a horizontal posture after inserting the substrate. COPYRIGHT: (C)2011,JPO&INPIT
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