发明名称 |
PRESSURE SENSOR, SENSOR PROBE COMPRISING A PRESSURE SENSOR, MEDICAL APPARATUS COMPRISING A SENSOR PROBE AND A METHOD OF FABRICATING A SENSOR PROBE |
摘要 |
The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.
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申请公布号 |
US2011094314(A1) |
申请公布日期 |
2011.04.28 |
申请号 |
US20080674439 |
申请日期 |
2008.08.19 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
DEKKER RONALD;VAN DER GRAAF FREDERIK;VELTHUIS JOHANNES F.M.;HAARTSEN JAAP R. |
分类号 |
G01L1/22 |
主分类号 |
G01L1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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