APPARATUS FOR THIN LAYER DEPOSITION

摘要

PURPOSE: A thin film deposition apparatus is provided to help a user to easily recycle deposition material while improving production yield. CONSTITUTION: A thin film deposition apparatus includes a deposition source, a deposition nozzle, and a pattern silt sheet(150). A deposition material(115) discharged from a deposition source is passed through the nozzle of the deposition source and the patterning slit sheet to be deposited on a substrate by a desired pattern. The thin film deposition apparatus is relatively moved to the substrate to perform deposition. A deposition material accepted within the deposition source is deposited in the substrate. A pattern slit sheet is separated from the substrate by a certain interval between them.